The PAP series controls temperature at a precision of ±0.1°C.
The PEC series controls temperature at a precision of ±0.05°C.
Orion Machinery Co Ltd developed "heat pump balance control," a temperature control technology that can reduce the power consumption by more than 70% compared with the existing method.
Based on the latest technology, the company offers the PAP precision air conditioner series and the PEC precision chiller series. These products are suited to control the temperature of equipment and workpieces in micromachining of precision mold, spherical surface, etc.
They are also appropriate to adjust the temperature of surrounding environment and resist solution to ensure the precision of film thickness in semiconductor photoresist application process.
Orion's heat pump balance control technology is based on the heat pump cycle for use in residential water heater. In general, the heat pump cycle is a unidirectional cycle to perform heating by absorbing heat from one side and exhausting it from the other.
Due to the latest technology, however, heating and cooling methods are provided in the heat exchanger on the load side as well, forming a continuous refrigerating cycle with a single compressor. As a result, the technology eliminates the necessity of electric heater to control temperature.
Because the flow of cooling medium is branched in a well balanced manner by the improvements in piping method and the control technique, the new products can adjust temperature in accordance with the variation in the amount of heat generation.
Compared with the existing PID controlled precision air conditioner with an electric heater, the power consumption is reduced by 73% to 3.2kW. With the adoption of brushless DC motor used in the existing product, the efficiency of the latest chiller is about 30% higher than that of a product using an AC servomotor.
The PAP series comes in three types with different flow volumes of 5, 10 and 20m3/min. Each is available with or without a HEPA filter. Prices range from ¥2,016,000 (US$19,537, price may vary depending on country) to ¥3,045,000 (including tax). Temperatures can be controlled at a precision of ±0.1°C in the range of 18-30°C.
Meanwhile, the PEC series are priced at ¥1,722,000 (including tax). The temperature control can be performed at a precision of ±0.05°C in the range of 10-60°C.
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