6409	ORION MACHINERY CO., LTD.
Address	1291, Oh-aza Yashiro, Chikuma-shi, Nagano, Japan
Department	Thermal Control Equipment Company
TEL/FAX	TEL:+81-26-272-5811 / FAX:+81-26-272-5754
E-Mail	denshi@orionkikai.co.jp
URL	http://www.orionkikai.co.jp
[HIGHLIGHT] The temperature control is very important factor in various FPD manufacturing processes and introduction of precise temperature control devices is indispensable. However, the electric power consumption of the devices is posing a big problem. We offer the precision temperature control systems for the air and water which features a new temperature control method, named "heat-pump balance control" with complete heater-less and exhaust-heat recovery by a heat-pump. The new system has attained up to 80% of energy saving compared with the conventional heater PID system. We propose improvement of the temperature control technologies required on each process, such as exposure, pre & post baking, alignment layer coating, rubbing and annealing.