4502	Y.A.C. Co., Ltd.
Address	3-10-6, Musashino, Akishima-city, Tokyo, Japan
Department	Plasma System Div.
TEL/FAX	TEL:+81-42-546-2885 / FAX:+81-42-546-2867
E-Mail	wmuto@yac.co.jp
URL	http://www.yac.co.jp
[HIGHLIGHT] YAC has been contributing to the panel manufacturing in the FPD industry by developing, manufacturing, and providing of the advanced Dry Etching and Ashing systems for many years. While an environmental issue has been strongly paid attention to in recent years, we have been challenging to develop the novel process aiming the realization of the process of fluorine-less gases from early stages. And also we have developed the Annealing system for LTPS process. It was already employed for the panel production, and won an excellent evaluation. We will introduce these advanced systems on the panel.