
Cover Story
MEMS sensor
Implemented in Volume in Mobile Handsets
Special Feature
Proposals for the revitalization of Japan(3)
LSI
[Inside]IBM develops timing analysis and at-speed test for 65nm ASIC that take into consideration process variation
[Inside]IEDM report:A series of novel nonvolatile memory technologies make their debut
[Report] RET extends the life of ArF immersion; coordination with DFM becomes more important
[Report] Neutral beam process controls damage, improving device property beyond 32nm
[Report] Featured SoC development(2):Hitachi's LSI for DVD recorders
FPD
[Inside]Technology to produce large-screen displays at low cost
[Report] Matsushita Electric Industrial to build a new PDP plant
[Report]CES report:A number of 100-inch scale living room televisions make an appearance; specifics on mobile televisions unveiled
Tutorial
Overview of process equipment technology analyzed through the front-runner(1): Introduction
Emerging Technology
Intel Corp. uses InSb to realize high-speed operation that surpasses silicon-based FET
Key Word
LER/LWR
Key Person
SanDisk "NAND flash memory demand will continue to grow still further"
Interview
Sanyo Aqua Technology's wastewater treatment business strategy for LSI plants
Challenger
JeVEC "We will not let EDA development engineers disappear from Japan"
Watcher/International
Worlds latest news
New Products
Automated wafer inspection system/KLA-Tencor Corp.
Wafer analyzer tool/Mizuho Information & Research Institute
Memory LSI tester with separately operated two test heads/Yokogawa Electric Corp.
UV thermal processing system/Novellus Systems, Inc.
Polymer ring frame/Shin-Etsu Polymer Co., Ltd.
Automatic vacuum tape mounter/NEC Engineering,Ltd.







