Fujifilm Expects to Debut New PZT Thin Film in 2012

Jul 24, 2012
Hideyoshi Kume, Nikkei Electronics
The exhibited PZT thin films made by adding niobium (Nb). The 6-inch product (right), which can be mass-produced, and the prototyped 8-inch produce (left).
The exhibited PZT thin films made by adding niobium (Nb). The 6-inch product (right), which can be mass-produced, and the prototyped 8-inch produce (left).
[Click to enlarge image]

Fujifilm Corp showed lead zirconate titanate (PZT) that can realize a piezoelectric constant twice as high as that of the company's existing product at Techno-Frontier 2012, which took place from July 11 to 13, 2012, in Tokyo.

In December 2011, Fujifilm unveiled the PZT formed on a 6-inch silicon (Si) substrate. And, this time, it disclosed an 8-inch product (See related article).

The piezoelectric constant of the new PZT was increased by adding highly-concentrated (about 13%) niobium (Nb) to PZT. This time, Fujifilm disclosed the piezoelectric constant (-e31,f) of the PZT for the first time. Its -e31,f is 25C/m2, which is much higher than that of the existing product (-e31,f = 13C/m2). The piezoelectric constant was measured by Germany-based aixACCT.

The evaluation with -e31,f is becoming a standard evaluation method for materials in the industry, Fujifilm said.

"The world's highest piezoelectric constant evaluated at laboratory levels is said to be about 27C/m2," the company said. "But it uses an expensive substrate. Our PZT has a piezoelectric constant of 25C/m2 and can be mass-produced."

Uniformity needed for 8-inch product

The 6-inch product is ready for volume production.

"Since we announced it in December 2011, we received many orders for it from many companies both in and outside Japan," Fujifilm said.

Also, the development of sensors and actuators using the company's new material is going well, and they will debut in the market within 2012 as scheduled, the company said.

As for the 8-inch product, there are still variations in the thickness and uniformity of formed piezoelectric thin film. But Fujifilm said, "We are certain that we will be able to meet the demand of ±5%."