AUO Develops 37-inch Full-HD LCD Panel With Oxide TFTs

Jan 28, 2010 08:56 Jyunichi Ooshita, Nikkei Electronics

AU Optronics Corp (AUO) prototyped a full-HD (1,920 x 1,080 pixels) 37-inch LCD panel by using TFTs based on a transparent amorphous oxide semiconductor (TAOS-TFTs).

Thus far, the sizes of LCD panels using TAOS-TFTs have been smaller than 20 inches. AUO plans to exhibit the prototype at the Society for Information Display 2010 (SID 2010), which will take place in May 2010 in the US.

The TAOS-TFT used for the prototype is a coplanar type made with amorphous IGZO (In-Ga-Zn-O). So, its source and drain electrodes are formed on the lateral sides of a channel. With elements whose gate width and length are 22 and 5μm, respectively, its carrier mobility is 10 to 13cm²/Vs, and its on/off ratio is higher than 10⁸, AUO said.

As for the instability of element characteristics, which tends to be a problem of TAOS-TFTs, AUO reduced it by applying a N₂O plasma process after forming an IGZO layer and by improving a passivation method.

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