[Semicon] Transfer Robot Powered Up to Carry More OLED Panels (Video)

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Dec 5, 2008 18:45 Shinichi Kato, Nikkei Microdevices

Yasukawa Brooks Automation Inc exhibited a dual-arm vacuum transfer robot with a weight capacity of up to 75kg (including robot hands) at Semicon Japan 2008, which is taking place from Dec 3 to 5, 2008, at Makuhari Messe in Chiba Prefecture, Japan.

The robot is intended for the transfer of organic EL panels and is capable of carrying two evaporation masks or substrates. The previous models have only one arm and a transfer capacity of up to 65kg, according to the company.

Yasukawa Brooks brought the huge transfer robot into its booth and actually operated it. With a maximum stroke of 2,300mm, the robot supports the size of the fourth-generation substrates. Seeing the impressive demonstration, some visitors commented, "It moves much faster than we expected."

In manufacturing color organic EL panels, organic EL materials corresponding to red, green and blue are usually coated using metal masks assigned for each color. Because the metal masks are heavy, vacuum robots with large transfer capacities have long been sought after.

In addition, to be competitive with LCD panels in terms of cost, there is an increasing demand for deposition equipment with higher throughput. The new dual-arm vacuum robot may be a solution to address such needs.


Demonstration of the dual-arm vacuum transfer robot

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