JEOL to Release 20,000x Tabletop SEM

Jan 18, 2008
Mayuko Uno, Nikkei Electronics
It is nicknamed "NeoScope." JEOL said the microscope's UI is devised so that even beginners can operate it.
It is nicknamed "NeoScope." JEOL said the microscope's UI is devised so that even beginners can operate it.
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JEOL Ltd announced a small scanning electron microscope (SEM) of 10-20,000 magnifications at 25th Electrotest Japan, which takes place from Jan 16 to 18, 2008, at Tokyo Big Sight.

The size of the SEM, "JCM-5000," is 492(w) × 458(d) × 434(h)mm. The company defines it as a tabletop electron microscope used for sampling inspection at production lines in factories and other applications. Conventionally, optical microscopes of about 1,000 magnifications are used at production sites.

JEOL realized "a usability equivalent to that of optical microscopes" to replace them with the new product, the company said. For example, it features two inspection modes, "high vacuum mode" and "low vacuum mode," and three switchable acceleration voltages (15, 10 and 5kV) so that nonconductive samples are not deposited while being inspected.

To inspect nonconductive samples without depositing them, it is necessary to use low vacuum mode or use high vacuum mode with an acceleration voltage of 5kV.

It takes three minutes to start up the microscope by, for example, exhausting air. The maximum allowable size of a sample is 50mm high and 70mm in diameter. The sample stage can be moved 35mm in both X and Y directions.

The company will release the microscope in March 2008 and start shipping in April 2008. Hitachi High-Technologies Corp released "TM-1000," a similar tabletop SEM of 20-10,000 magnifications, in 2005.


Correction Notice: In the original article, we mentioned the retail price of this product. However, because JEOL Ltd has not decided the retail price outside Japan yet, we deleted the information.