Fujitsu Ltd and Fujitsu Laboratories Ltd have announced a platform technology for 45nm LSI logic chips, which combines technologies for low power consumption and high-performance interconnect.
In order to improve LSIs, there are two problems to overcome. First, to shorten the gate length of each transistor so as to make the spaces between interconnects. Second, to minimize the time lag from interconnects between millions of transistors within the LSI chip for higher speed.
Fujitsu researchers used nano-clustering silica (NCS), which has a dielectric constant of 2.25 -- claimed to be the lowest of any insulating film reported to date -- in a lower interconnect region suitable for the smallest interconnect spaces. NCS is an insulating material pocked with miniscule holes, enabling both a low dielectric value and high mechanical strength simultaneously. NCS is used in between different layers instead of an individual layer to further reduce interconnect capacitance.
Compared with previous 45nm technologies on record, the new platform reduces the leakage current that occurs when current is wasted in wait states to one-fifth that of previous levels and reduces interconnect-induced lag times by approximately 14%. The new technology boosts up LSI logic chips with higher speeds, smaller size and lower power consumption.

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